Izibuko ze-Carmanhaas noma izibonisi eziphelele zisetshenziswa emigodini ye-laser njengezibonisi ezingemuva nezibuko ezigoqekayo, nangaphandle njengama-bender e-beam ezinhlelweni zokulethwa kwemishayo.
I-silicon yi-mirror substrate esetshenziswa kakhulu; inzuzo yawo izindleko eziphansi, ukuqina okuhle, nokuzinza kokushisa.
Isibuko se-molybdenum esiqine ngokwedlulele siyenza ilungele izindawo ezibonakalayo ezidinga kakhulu. Isibuko se-Mo ngokuvamile sinikezwa singagcotshiwe.
| Imininingwane | Amazinga |
| Ukubekezelela Dimensional | +0.000” / -0.005” |
| Ukujiya Ukubekezelelana | ±0.010” |
| Ukufana : (Plan) | ≤ 3 arc amaminithi |
| Imbobo ecacile (epholishiwe) | 90% ububanzi |
| Umfanekiso ongaphezulu @ 0.63um | Amandla: 2 imiphetho, Irregularity: 1 fringe |
| Scratch-Dig | 10-5 |
| Igama Lomkhiqizo | Ububanzi (mm) | ET (mm) | Ukugqoka |
| I-Mo Mirror | 30 | 3/6 | Akukho ukunamathela, i-AOI: 45° |
| 50.8 | 5.08 | ||
| I-Silicon Mirror | 30 | 3/4 | HR@106um, AOI:45° |
| 38.1 | 4/8 | ||
| 50.8 | 9.525 |
